Complementary Metal Oxide Semiconductor Compatible Silicon-on-Insulator Optical Rib Waveguides with Local Oxidation of Silicon IsolationET C A L I B ~ &RIQUEMENTET C A L I B ~&RIQUEMENT.POMPES PAR TRANSITIONS MULTIPLES

منو

" Complementary Metal Oxide Semiconductor Compatible Silicon-on-Insulator Optical Rib Waveguides with Local Oxidation of Silicon IsolationET C A L I B ~ &RIQUEMENTET C A L I B ~&RIQUEMENT.POMPES PAR TRANSITIONS MULTIPLES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	154915
Doc. No	:	ET26707
Main Entry	:	Lynda Rowe, B.Eng. Carleton University
Title Proper	:	Complementary Metal Oxide Semiconductor Compatible Silicon-on-Insulator Optical Rib Waveguides with Local Oxidation of Silicon IsolationET C A L I B ~ RIQUEMENTET C A L I B ~RIQUEMENT.POMPES PAR TRANSITIONS MULTIPLES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	The Local Oxidation of Silicon (LOCOS) technique is used for the first time to defineoptical rib waveguides in silicon-on-insulator (SOI) material. Optical mode simulationwas used to determine rib geometries suitable for single-mode propagation in the 1550nm optical telecommunications band. Test devices were then fabricated in SO1 materialwith a Si film thickness near 3 pm. Cut-and-etchback optical testing of 3 pm drawn.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL50981.pdf
Title and statement of responsibility and	:	Complementary Metal Oxide Semiconductor Compatible Silicon-on-Insulator Optical Rib Waveguides with Local Oxidation of Silicon IsolationET C A L I B ~ RIQUEMENTET C A L I B ~RIQUEMENT.POMPES PAR TRANSITIONS MULTIPLES [Thesis]