Design and Fabrication of Surface Textured MEMS for Infrared Gas Sensors.POMPES PAR TRANSITIONS MULTIPLES

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" Design and Fabrication of Surface Textured MEMS for Infrared Gas Sensors.POMPES PAR TRANSITIONS MULTIPLES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	154048
Doc. No	:	ET25840
Main Entry	:	Liwei Sun
Title Proper	:	Design and Fabrication of Surface Textured MEMS for Infrared Gas Sensors.POMPES PAR TRANSITIONS MULTIPLES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	This thesis concentrates primarily on optimum design and fabrication of novelMEMS (micro-electro-mechanical systems) infrared gas sensors. It deals with thethermal, electrical, optical and mechanical response for a spectroscopic gas sensor basedon MEMS surface textured technologies..
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL50109.pdf
Title and statement of responsibility and	:	Design and Fabrication of Surface Textured MEMS for Infrared Gas Sensors.POMPES PAR TRANSITIONS MULTIPLES [Thesis]