Design & Fabrication of Corrugated Micromachined Membranes.POMPES PAR TRANSITIONS MULTIPLES

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" Design & Fabrication of Corrugated Micromachined Membranes.POMPES PAR TRANSITIONS MULTIPLES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	153477
Doc. No	:	ET25269
Main Entry	:	Dwayne D. Chrusch
Title Proper	:	Design Fabrication of Corrugated Micromachined Membranes.POMPES PAR TRANSITIONS MULTIPLES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	In this thesis, the design, fabrication and testing of micromachined thin film coppermembranes is investigated. Membranes ranged from lmm to lOmm in diameter, and thecopper thin film was on the order of lpm thick. The final application, an RF phase.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL49515.pdf
Title and statement of responsibility and	:	Design Fabrication of Corrugated Micromachined Membranes.POMPES PAR TRANSITIONS MULTIPLES [Thesis]