Detection of Particulate Impurities on Semiconductor SurfacesPOMPES PAR TRANSITIONS MULTIPLES

منو

" Detection of Particulate Impurities on Semiconductor SurfacesPOMPES PAR TRANSITIONS MULTIPLES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	152703
Doc. No	:	ET24495
Main Entry	:	Jason Patrick Wright
Title Proper	:	Detection of Particulate Impurities on Semiconductor SurfacesPOMPES PAR TRANSITIONS MULTIPLES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	Contamination in an microelectronics manufacturing environment can causesevere problems with the reliability and yield of semiconductor devices. Meeting theaggressive requirements for contamination control requires the development of advancedtechniques in defect detection, prevention, and swface preparation. Thus in order tocontrol the device manufacturing environment, it is necessary to detect the presence andif possible the origin of the contaminant, airborne or otherwise, actually.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL48702.pdf
Title and statement of responsibility and	:	Detection of Particulate Impurities on Semiconductor SurfacesPOMPES PAR TRANSITIONS MULTIPLES [Thesis]