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Document Type : Latin Dissertation
Language of Document : English
Record Number : 152621
Doc. No : ET24413
Main Entry : Orion Bruckman
Title Proper : Investigations Into a Silicon Based MEMS Lab on a ChipPOMPES PAR TRANSITIONS MULTIPLES
Note : This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract : The goal of this thesis is to explore the use of Micro-Electro-Mechanical Systems for bio-chemical analysis. The work consists of two projects; the first deals with the fabricationand testing of MEMS a die. the second an application oriented investigation providingincremental steps towards establishing an environment for a lab-on-a-chip research group.The first project relates to the fabrication of MEMS structures, and is an investigation of alow-cost post processing lab to determine if an in-house post processing environment forstandard CMOS processes using KOH etching would be beneficial and feasible. Thisproject also links available Canadian Microelectronics Corporation (CMC) supportedfabrication processes (Mite1 1Spm CMOS) to a commercial CAD package (IntelfiCAD.
Subject : Electericl tess
: برق
electronic file name : TL48620.pdf
Title and statement of responsibility and : Investigations Into a Silicon Based MEMS Lab on a ChipPOMPES PAR TRANSITIONS MULTIPLES [Thesis]
 
 
 
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