Investigations Into a Silicon Based MEMS Lab on a ChipPOMPES PAR TRANSITIONS MULTIPLES

منو

" Investigations Into a Silicon Based MEMS Lab on a ChipPOMPES PAR TRANSITIONS MULTIPLES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	152621
Doc. No	:	ET24413
Main Entry	:	Orion Bruckman
Title Proper	:	Investigations Into a Silicon Based MEMS Lab on a ChipPOMPES PAR TRANSITIONS MULTIPLES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	The goal of this thesis is to explore the use of Micro-Electro-Mechanical Systems for bio-chemical analysis. The work consists of two projects; the first deals with the fabricationand testing of MEMS a die. the second an application oriented investigation providingincremental steps towards establishing an environment for a lab-on-a-chip research group.The first project relates to the fabrication of MEMS structures, and is an investigation of alow-cost post processing lab to determine if an in-house post processing environment forstandard CMOS processes using KOH etching would be beneficial and feasible. Thisproject also links available Canadian Microelectronics Corporation (CMC) supportedfabrication processes (Mite1 1Spm CMOS) to a commercial CAD package (IntelfiCAD.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL48620.pdf
Title and statement of responsibility and	:	Investigations Into a Silicon Based MEMS Lab on a ChipPOMPES PAR TRANSITIONS MULTIPLES [Thesis]