A Study of High Q Spiral Inductor Fabrication Methods Using a Production Silicon Process with Application to a Current Tbned Microwave OscillatorPOMPES PAR TRANSITIONS MULTIPLES

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" A Study of High Q Spiral Inductor Fabrication Methods Using a Production Silicon Process with Application to a Current Tbned Microwave OscillatorPOMPES PAR TRANSITIONS MULTIPLES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	152590
Doc. No	:	ET24382
Main Entry	:	Daniel N. Badiere B3c.E.
Title Proper	:	A Study of High Q Spiral Inductor Fabrication Methods Using a Production Silicon Process with Application to a Current Tbned Microwave OscillatorPOMPES PAR TRANSITIONS MULTIPLES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	This document describes the design and measurement of a series of spiral inductorsfabricated on tow resistivity (1OQcm) silicon, and a bias current tuned oscillator thatincorporated one of the previously mentioned spiral inductors.The inductors were designed and fabricated in three distinct ways: top metal only(basic inductors), top metal with an inter-winding trench (trench inductors), and.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL48589.pdf
Title and statement of responsibility and	:	A Study of High Q Spiral Inductor Fabrication Methods Using a Production Silicon Process with Application to a Current Tbned Microwave OscillatorPOMPES PAR TRANSITIONS MULTIPLES [Thesis]