Silicon on Insulator CMOS and Microelectromechanical Systems: Mechanical Devices, Sensing Techniques and System Electronics

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" Silicon on Insulator CMOS and Microelectromechanical Systems: Mechanical Devices, Sensing Techniques and System Electronics "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	152124
Doc. No	:	ET23916
Main Entry	:	Francisco Tejada
Title Proper	:	Silicon on Insulator CMOS and Microelectromechanical Systems: Mechanical Devices, Sensing Techniques and System Electronics
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	The marriage of integrated circuits and microelectromechanical systems (MEMS) al-lows for the design of compact, low power, high performance sensing solutions. Thesedevices are on the cutting edge of technology pushing the limits of fabrication and integra-tion..
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL48062.pdf
Title and statement of responsibility and	:	Silicon on Insulator CMOS and Microelectromechanical Systems: Mechanical Devices, Sensing Techniques and System Electronics [Thesis]