ELECTROSTATIC REMOVAL OF PARTICLES

منو

" ELECTROSTATIC REMOVAL OF PARTICLES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	151108
Doc. No	:	ET22900
Main Entry	:	Chunzhi Yan
Title Proper	:	ELECTROSTATIC REMOVAL OF PARTICLES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	Electrostatic removal of particles was studied using bipolar electrostatic particlegetters (ESPGs). The particle removal effectiveness was investigated with a fixed ESPGin an air environment and mobile ESPGs in a vacuum environment. Three processparameters were varied: process cycle, applied voltage, and cleaning method. It wasfound that the ESPGs were not effective at removing particles due to its bipolar nature.Mono-polar ESPG with external flow was recommended for further research...,....-...,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL46128.pdf
Title and statement of responsibility and	:	ELECTROSTATIC REMOVAL OF PARTICLES [Thesis]