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Document Type : Latin Dissertation
Language of Document : English
Record Number : 151108
Doc. No : ET22900
Main Entry : Chunzhi Yan
Title Proper : ELECTROSTATIC REMOVAL OF PARTICLES
Note : This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract : Electrostatic removal of particles was studied using bipolar electrostatic particlegetters (ESPGs). The particle removal effectiveness was investigated with a fixed ESPGin an air environment and mobile ESPGs in a vacuum environment. Three processparameters were varied: process cycle, applied voltage, and cleaning method. It wasfound that the ESPGs were not effective at removing particles due to its bipolar nature.Mono-polar ESPG with external flow was recommended for further research...,....-...,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject : Electericl tess
: برق
electronic file name : TL46128.pdf
Title and statement of responsibility and : ELECTROSTATIC REMOVAL OF PARTICLES [Thesis]
 
 
 
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