ELECTRON CYCLOTRON RESONANCE CHEMICAL VAPOR DEPOSITlON OF PRECIOUS METAL DOPED DIAMOND-LIKE CARBON FILMS

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" ELECTRON CYCLOTRON RESONANCE CHEMICAL VAPOR DEPOSITlON OF PRECIOUS METAL DOPED DIAMOND-LIKE CARBON FILMS "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	151006
Doc. No	:	ET22798
Main Entry	:	Mayumi Ueno
Title Proper	:	ELECTRON CYCLOTRON RESONANCE CHEMICAL VAPOR DEPOSITlON OF PRECIOUS METAL DOPED DIAMOND-LIKE CARBON FILMS
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	The work presented in this thesis is focused on the development of a novel processfor synthesizing of metal and non-metal doped diamond-like carbon films. The processutilizes metal organic liquid precursor decomposition using an electron cyclotronresonance (ECR) chemical vapor deposition (CVD) technique.For the proposed synthesis studies, an ECR CVD system was designed andassembled in our laboratory. This system is equipped with an ECR source, a RF substratebias and a metal organic precursor chemical delivery system.Un-doped, nitrogen doped and ruthenium doped diamond-like carbon films weresynthesized using methaneholuene, pyridine and bis-(ethylcyclopentadieny1)-rutheniumas source gases. respectively. Diamond-like nature of the films, i-e., sp3 carbon bondingstate. was confirmed by Fourier transform infra-red spectroscopy (FT-IR)...,....-...,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL46024.pdf
Title and statement of responsibility and	:	ELECTRON CYCLOTRON RESONANCE CHEMICAL VAPOR DEPOSITlON OF PRECIOUS METAL DOPED DIAMOND-LIKE CARBON FILMS [Thesis]