DEVELOPMENT OF MICROFABRICATED GAS IONIZAT'ION DETECTORS

دانشگاه آزاد اسلامی اصفهان(خوراسگان)

منو

رکورد قبلی

رکورد بعدی

" DEVELOPMENT OF MICROFABRICATED GAS IONIZAT'ION DETECTORS "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	150870
Doc. No	:	ET22662
Main Entry	:	Dehwar Hossain Khan
Title Proper	:	DEVELOPMENT OF MICROFABRICATED GAS IONIZAT'ION DETECTORS
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	This research focused on the development of novel Micro Avalanche Chamber(MAC) gas ionization radiation detectors using modem microfabrication techniques.These detectors have applications as X-ray image detectors in the medical fieId and asparticle tracking detectors in the Id of nuclear physics and astrophysics. A single-sidedpolished, c r y a d h e (TOO), silicon wafer was used to fabricate the detector. The 3.3 mmx 3.3 mm device was fhbrikated on silicon using a 4 J urn polyimide layer as the anode-cathode hdator. The metal used for anode and cathode Iayer was aluminum The entiremicrofabrication process was performed in-house at the University of Louisville.Microfkbrication techniques utilized in this research include initial waferpreparation, deposition of poIyhide using spin-on methods, aluminum evaporation,photolithography, wet etching of aluminum, and reactive ion etching of polyimide. The....-...,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL45888.pdf
Title and statement of responsibility and	:	DEVELOPMENT OF MICROFABRICATED GAS IONIZAT'ION DETECTORS [Thesis]