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Document Type : Latin Dissertation
Language of Document : English
Record Number : 150870
Doc. No : ET22662
Main Entry : Dehwar Hossain Khan
Title Proper : DEVELOPMENT OF MICROFABRICATED GAS IONIZAT'ION DETECTORS
Note : This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract : This research focused on the development of novel Micro Avalanche Chamber(MAC) gas ionization radiation detectors using modem microfabrication techniques.These detectors have applications as X-ray image detectors in the medical fieId and asparticle tracking detectors in the Id of nuclear physics and astrophysics. A single-sidedpolished, c r y a d h e (TOO), silicon wafer was used to fabricate the detector. The 3.3 mmx 3.3 mm device was fhbrikated on silicon using a 4 J urn polyimide layer as the anode-cathode hdator. The metal used for anode and cathode Iayer was aluminum The entiremicrofabrication process was performed in-house at the University of Louisville.Microfkbrication techniques utilized in this research include initial waferpreparation, deposition of poIyhide using spin-on methods, aluminum evaporation,photolithography, wet etching of aluminum, and reactive ion etching of polyimide. The....-...,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject : Electericl tess
: برق
electronic file name : TL45888.pdf
Title and statement of responsibility and : DEVELOPMENT OF MICROFABRICATED GAS IONIZAT'ION DETECTORS [Thesis]
 
 
 
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