ANALYSIS AND DESl POST-CMOS THERMALLY CO BlOS ARRAY MICROSYSTEMS

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" ANALYSIS AND DESl POST-CMOS THERMALLY CO BlOS ARRAY MICROSYSTEMS "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	150786
Doc. No	:	ET22578
Main Entry	:	athan Andrew Dotson
Title Proper	:	ANALYSIS AND DESl POST-CMOS THERMALLY CO BlOS ARRAY MICROSYSTEMS
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	A post-CMOS design and fabrication methodology has been investigatedfor the generation of a microsystem which supports a protein-based biosensorarray with thermal control. implementation of this microsystem design 'requires aclear understanding of the various layers and their role in CMOS processingtechnology, especially when the MEMS structures are to be fabricated post-CMOS. In this work,....-...,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL45802.pdf
Title and statement of responsibility and	:	ANALYSIS AND DESl POST-CMOS THERMALLY CO BlOS ARRAY MICROSYSTEMS [Thesis]