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" Ferroelectric thin films for microwave and photonics applications "


Document Type : Latin Dissertation
Language of Document : English
Record Number : 149330
Doc. No : ET21122
Main Entry : Ding-Yuan Chen
Title Proper : Ferroelectric thin films for microwave and photonics applications
Note : This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract : The goal of this research is to implement integrated ferroelectric thin film devices formicrowave and photonics applications, and to investigate the relation between ferroelectricmaterial parameters and device performance.Pulsed laser deposition (PLD) was used to deposit barium strontium titanate thin filmsand parallel-plate capacitors were fabricated by standard microfabrication techniques. Thinfilm deposition conditions, the effects of annealing, and material properties wereinvestigated and correlated. Representative.
Subject : Electericl tess
: برق
electronic file name : TL44270.pdf
Title and statement of responsibility and : Ferroelectric thin films for microwave and photonics applications [Thesis]
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TL44270.pdf
TL44270.pdf
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