A Mechanistic Approach to Tuning of MEMS Resonators

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" A Mechanistic Approach to Tuning of MEMS Resonators "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	149171
Doc. No	:	ET20963
Main Entry	:	Abhyudai Singh
Title Proper	:	A Mechanistic Approach to Tuning of MEMS Resonators
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	A novel method of bidirectional frequency tuning of a beam-type MEMS resonator ispresented. This method is based on the use of follower and axial end loads that are shown todecrease and increase the resonant frequency of the beam. The end loads were implementedin the resonator through electrostatic forces that act near the free end of the beam through.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL44109.pdf
Title and statement of responsibility and	:	A Mechanistic Approach to Tuning of MEMS Resonators [Thesis]