Investigation of Fabrication Process Development for Integrated Optical Grating Structures

منو

" Investigation of Fabrication Process Development for Integrated Optical Grating Structures "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	149016
Doc. No	:	ET20808
Main Entry	:	Divya Pisharoty
Title Proper	:	Investigation of Fabrication Process Development for Integrated Optical Grating Structures
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	Sub-micron optical gratings are essential integrated elements to couple light into waveguidesand for optical monitoring of microfluidic channels or MEMS devices. Since the required featuresin the sub-micron regime.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL43953.pdf
Title and statement of responsibility and	:	Investigation of Fabrication Process Development for Integrated Optical Grating Structures [Thesis]