Electrostatic Testing of Simple MEMS StructuresET C A L I B ~ &RIQUEMENTET C A L I B ~&RIQUEMENT.POMPES PAR TRANSITIONS MULTIPLES

منو

" Electrostatic Testing of Simple MEMS StructuresET C A L I B ~ &RIQUEMENTET C A L I B ~&RIQUEMENT.POMPES PAR TRANSITIONS MULTIPLES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	154872
Doc. No	:	ET26664
Main Entry	:	Kar Mun Cheng
Title Proper	:	Electrostatic Testing of Simple MEMS StructuresET C A L I B ~ RIQUEMENTET C A L I B ~RIQUEMENT.POMPES PAR TRANSITIONS MULTIPLES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	In this thesis, an adapted form of dynamic Electrostatic Force Microscopy is presented asan alternative technique for non-contact dynamic characterization of beam resonators.The actuation of the test resonant beam was accomplished by applying a modulatedsignal to a probe cantilever that was positioned closely above the resonant beam. The.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL50938.pdf
Title and statement of responsibility and	:	Electrostatic Testing of Simple MEMS StructuresET C A L I B ~ RIQUEMENTET C A L I B ~RIQUEMENT.POMPES PAR TRANSITIONS MULTIPLES [Thesis]