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" STRESSED MEMS CPW CANTILEVERS FOR HIGH FREQUENCY SCANNING PROBE MICROSCOPY.POMPES PAR TRANSITIONS MULTIPLES "


Document Type : Latin Dissertation
Language of Document : English
Record Number : 153551
Doc. No : ET25343
Main Entry : Bingqing Liang
Title Proper : STRESSED MEMS CPW CANTILEVERS FOR HIGH FREQUENCY SCANNING PROBE MICROSCOPY.POMPES PAR TRANSITIONS MULTIPLES
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Abstract : This thesis presents a novel stressed MEMS coplanar waveguide (CPW) cantilever tosolve the limitations of conventional cantilevers in EFM measurements. The CPWstructure creates a matched impedance and shields the signal conductor along thecantilever to improve bandwidth, reduce electromagnetic interference effects, and enable.
Subject : Electericl tess
: برق
electronic file name : TL49593.pdf
Title and statement of responsibility and : STRESSED MEMS CPW CANTILEVERS FOR HIGH FREQUENCY SCANNING PROBE MICROSCOPY.POMPES PAR TRANSITIONS MULTIPLES [Thesis]
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TL49593.pdf
TL49593.pdf
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