INVESTIGATION OF ELECTROSTATICALLY DRIVEN MICRO ACTUATORS.POMPES PAR TRANSITIONS MULTIPLES

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" INVESTIGATION OF ELECTROSTATICALLY DRIVEN MICRO ACTUATORS.POMPES PAR TRANSITIONS MULTIPLES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	153537
Doc. No	:	ET25329
Main Entry	:	Xiaohong Mu
Title Proper	:	INVESTIGATION OF ELECTROSTATICALLY DRIVEN MICRO ACTUATORS.POMPES PAR TRANSITIONS MULTIPLES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	As the development of fiber optic communications, Micro electro mechanicalsystem (MEMS) technology has been one of the most promising technologies to createoptical components. MEMS devices have a number of advantages, such as small size,low power consumption, etc. However, more works and researches need to be done to.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL49579.pdf
Title and statement of responsibility and	:	INVESTIGATION OF ELECTROSTATICALLY DRIVEN MICRO ACTUATORS.POMPES PAR TRANSITIONS MULTIPLES [Thesis]