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Document Type : Latin Dissertation
Language of Document : English
Record Number : 153070
Doc. No : ET24862
Main Entry : Julianna E. Lin
Title Proper : Design and Characterization of MEMS Micromirror DevicesPOMPES PAR TRANSITIONS MULTIPLES
Note : This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract : This thesis explores the design, implementation and characterization of MEMSmicromirror devices for use in optical systems. Possible applications for these devicesinclude areas such as adaptive optics, beam scanning, and optical switches. The deviceswere fabricated using a commercial MEMS foundry process, known as the Multi-UserMEMS Processes (MUMPS) foundry service; the resulting prototypes were characterizedusing a phase-shifting Mirau interferometer, assembled specifically for this work. Fromthese results, it was shown that the MUMPS process can be used to create satisfactorydesigns for rotational micromirrors with tilt angles in the range of 0-23 mrad and controlvoltages in the range of 0-30 V. In addition, the behaviour.
Subject : Electericl tess
: برق
electronic file name : TL49073.pdf
Title and statement of responsibility and : Design and Characterization of MEMS Micromirror DevicesPOMPES PAR TRANSITIONS MULTIPLES [Thesis]
 
 
 
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