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" A Prototype Process Control System for Chemical Vapor DepositionPOMPES PAR TRANSITIONS MULTIPLES "


Document Type : Latin Dissertation
Language of Document : English
Record Number : 152978
Doc. No : ET24770
Main Entry : Xiaozhong Zhao
Title Proper : A Prototype Process Control System for Chemical Vapor DepositionPOMPES PAR TRANSITIONS MULTIPLES
Note : This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract : This report focuses on n sub-project (Control Project) of Xj laur Project. \shich pursueed real-time process control based on in sirzr analfsis of Chemical Vapor Deposition in an industrials h Ie CVD (Chemical Vapor Deposition) reactor. The ,Y.laur Project incohed expertise fromSj laur Enterprise Ltd. (a compan \\ hich pro\ ides sen ice to semiconductor manufacturingin dust). Chemical Engineerins Department, Ph: sics Department and Electrical andComputer Engineering Department of Cni\ersi~ of Neu Bruns\\ i d .This report describes the major accomplishments of the Control Project: control ssstemplatform selection. control s. stern sothare daelopment. process controller design andimplementation..
Subject : Electericl tess
: برق
electronic file name : TL48981.pdf
Title and statement of responsibility and : A Prototype Process Control System for Chemical Vapor DepositionPOMPES PAR TRANSITIONS MULTIPLES [Thesis]
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TL48981.pdf
TL48981.pdf
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