Experimental Investigation and Modeling of Anisotropic Etching of Silicon in Tetra-Methyl Ammonium HydroxidePOMPES PAR TRANSITIONS MULTIPLES

منو

" Experimental Investigation and Modeling of Anisotropic Etching of Silicon in Tetra-Methyl Ammonium HydroxidePOMPES PAR TRANSITIONS MULTIPLES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	152849
Doc. No	:	ET24641
Main Entry	:	Anand Pandy
Title Proper	:	Experimental Investigation and Modeling of Anisotropic Etching of Silicon in Tetra-Methyl Ammonium HydroxidePOMPES PAR TRANSITIONS MULTIPLES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	Anisotropic etching of silicon is a fundamental process in micro-systems technology(MST) and in the fabrication of micro-electromechanical systems (MEMS). This workaddresses the fundamental atomic mechanisms of anisotropic etching of single-crystal sil-.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL48850.pdf
Title and statement of responsibility and	:	Experimental Investigation and Modeling of Anisotropic Etching of Silicon in Tetra-Methyl Ammonium HydroxidePOMPES PAR TRANSITIONS MULTIPLES [Thesis]