CMOS Cantilever MicroresonatorPOMPES PAR TRANSITIONS MULTIPLES

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" CMOS Cantilever MicroresonatorPOMPES PAR TRANSITIONS MULTIPLES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	152565
Doc. No	:	ET24357
Main Entry	:	Tiansheng Zhou
Title Proper	:	CMOS Cantilever MicroresonatorPOMPES PAR TRANSITIONS MULTIPLES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	A simple CMOS resonant microcantilever is designed and fabricated. Designprinciples and considerations about cantilever arms, releasing the structure,piezoresistive detection, bonding pads and etch opening are given. The resultantpiezoresistor has very large response, requiring no signal amplification. Combinationalsilicon etching is proposed and developed. The silicon-doped TMAH anisotropic.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL48564.pdf
Title and statement of responsibility and	:	CMOS Cantilever MicroresonatorPOMPES PAR TRANSITIONS MULTIPLES [Thesis]