LARGE DEFLECTIONS OF A MAGNETICALLY ACTUATED MICROCANTILEVER WITH AN ON-CHIP PERMALLOY LAYERPOMPES PAR TRANSITIONS MULTIPLES

منو

" LARGE DEFLECTIONS OF A MAGNETICALLY ACTUATED MICROCANTILEVER WITH AN ON-CHIP PERMALLOY LAYERPOMPES PAR TRANSITIONS MULTIPLES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	152558
Doc. No	:	ET24350
Main Entry	:	BING YU
Title Proper	:	LARGE DEFLECTIONS OF A MAGNETICALLY ACTUATED MICROCANTILEVER WITH AN ON-CHIP PERMALLOY LAYERPOMPES PAR TRANSITIONS MULTIPLES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	Efforts have been mzde to integrate a magnetic material, Permalloy, intomicromachined devices. Magnetic characteristics of the Permalloy deposited byelectroplating technique were measured, with the saturation magnetization of 0.56Tesla along the material's longest axis, coercive force of 3 Gauss and remnantmagnetization of 0.22 Tesla. An acceptable thickness and composition uniformityof the material has been obtained. Little internal stress was observed in themicrostructure during the deposition of the magnetic material..
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL48557.pdf
Title and statement of responsibility and	:	LARGE DEFLECTIONS OF A MAGNETICALLY ACTUATED MICROCANTILEVER WITH AN ON-CHIP PERMALLOY LAYERPOMPES PAR TRANSITIONS MULTIPLES [Thesis]