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Document Type : Latin Dissertation
Language of Document : English
Record Number : 152338
Doc. No : ET24130
Main Entry : Sazzadur Chowdhury
Title Proper : MICROELECTROMECHANICAL (MEMS) VLSI STRUCTURES FOR HEARING INSTRUMENTSPOMPES PAR TRANSITIONS MULTIPLES
Note : This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract : In this thesis two microelectromechanical (MEMS) structures have been designed for usein a hearing instrument. MEMS realization of a capacitive microphone has beendesigned that has a higher sensitivity in mV/Pa than the sensitivity of the existing MEMSmicrophones together with an extended audio frequency response range. Themicrophone is designed using a low residual stress polysilicon germanium diaphragm ofthickness 0.8 pm and an area of 2.5 x 2.5 mm'. an airgap of thickness 3.0 prn and a.
Subject : Electericl tess
: برق
electronic file name : TL48332.pdf
Title and statement of responsibility and : MICROELECTROMECHANICAL (MEMS) VLSI STRUCTURES FOR HEARING INSTRUMENTSPOMPES PAR TRANSITIONS MULTIPLES [Thesis]
 
 
 
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