MICROELECTROMECHANICAL (MEMS) VLSI STRUCTURES FOR HEARING INSTRUMENTSPOMPES PAR TRANSITIONS MULTIPLES

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" MICROELECTROMECHANICAL (MEMS) VLSI STRUCTURES FOR HEARING INSTRUMENTSPOMPES PAR TRANSITIONS MULTIPLES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	152338
Doc. No	:	ET24130
Main Entry	:	Sazzadur Chowdhury
Title Proper	:	MICROELECTROMECHANICAL (MEMS) VLSI STRUCTURES FOR HEARING INSTRUMENTSPOMPES PAR TRANSITIONS MULTIPLES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	In this thesis two microelectromechanical (MEMS) structures have been designed for usein a hearing instrument. MEMS realization of a capacitive microphone has beendesigned that has a higher sensitivity in mV/Pa than the sensitivity of the existing MEMSmicrophones together with an extended audio frequency response range. Themicrophone is designed using a low residual stress polysilicon germanium diaphragm ofthickness 0.8 pm and an area of 2.5 x 2.5 mm'. an airgap of thickness 3.0 prn and a.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL48332.pdf
Title and statement of responsibility and	:	MICROELECTROMECHANICAL (MEMS) VLSI STRUCTURES FOR HEARING INSTRUMENTSPOMPES PAR TRANSITIONS MULTIPLES [Thesis]