MONOLITHIC SUSPENDED OPTICAL WAVEGUIDES FOR INP MOEMS_RU`QHbaYdHPJUL(egfUOQhNiPMjOQHbaYgk+LN`l[nmo[jLpOlfqr[jHPOs[ ctRU`Wur`l`QTVL_fHCY7HKJULvijLNw

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" MONOLITHIC SUSPENDED OPTICAL WAVEGUIDES FOR INP MOEMS_RU`QHbaYdHPJUL(egfUOQhNiPMjOQHbaYgk+LN`l[nmo[jLpOlfqr[jHPOs[ ctRU`Wur`l`QTVL_fHCY7HKJULvijLNw "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	152049
Doc. No	:	ET23841
Main Entry	:	Daniel P. Kelly
Title Proper	:	MONOLITHIC SUSPENDED OPTICAL WAVEGUIDES FOR INP MOEMS_RU`QHbaYdHPJUL(egfUOQhNiPMjOQHbaYgk+LN`l[nmo[jLpOlfqr[jHPOs[ ctRU`Wur`l`QTVL_fHCY7HKJULvijLNw
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	A key platform technology for InP optical waveguide MEMS is developed. Thenovel waveguide design is entirely released from the substrate by sacrificial etching andthe suspended waveguide is supported by lateral tethers. This allows free-standing,movable segments of waveguide while preventing substrate leakage loss in fixedsegments of the waveguides. The optical, mechanical, and material design process ispresented. A single-mask fabrication process is developed that can be extended to morecomplex devices employing electrostatic actuation. Relative power and Fabry-Perotcontrast measurements indicate the fabricated suspended waveguides exhibit apropagation loss of 2.2,.............-....,....-...,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL47102.pdf
Title and statement of responsibility and	:	MONOLITHIC SUSPENDED OPTICAL WAVEGUIDES FOR INP MOEMS_RU`QHbaYdHPJUL(egfUOQhNiPMjOQHbaYgk+LN`l[nmo[jLpOlfqr[jHPOs[ ctRU`Wur`l`QTVL_fHCY7HKJULvijLNw [Thesis]