DESIGN AND ANALYSIS OF A MICROELECTROMECHANCAL SYSTEMS (MEMS) MICRO-TRANSLATION STAGE'WITH INDEFINITE LINEAR TRANSLATION

منو

" DESIGN AND ANALYSIS OF A MICROELECTROMECHANCAL SYSTEMS (MEMS) MICRO-TRANSLATION STAGE'WITH INDEFINITE LINEAR TRANSLATION "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	151778
Doc. No	:	ET23570
Main Entry	:	CYNTHIA KAISER FERGUSON
Title Proper	:	DESIGN AND ANALYSIS OF A MICROELECTROMECHANCAL SYSTEMS (MEMS) MICRO-TRANSLATION STAGE'WITH INDEFINITE LINEAR TRANSLATION
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	MEMS technology is an emerging capability that is beginning to revolutionizevarious systems by corn bining electronics with miniaturized mechanical actuators toperform sensing, optical switching, and various other applications. One engineering needin this new field is an actuator capable of traveling long distances, while maintaining lowpower, low voltage, and accuracy required for optical coupling. A Micro-TranslationStage is developed in this thesis that fulfills the needs described above. This new conceptwas designed based on current electronics and MEMS fabrication methods, usingcapacitive forces set up in a linear motor fashion, to pull a translating shuttle down achannel. Analyses were performed to assure the........-....,....-...,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL46812.pdf
Title and statement of responsibility and	:	DESIGN AND ANALYSIS OF A MICROELECTROMECHANCAL SYSTEMS (MEMS) MICRO-TRANSLATION STAGE'WITH INDEFINITE LINEAR TRANSLATION [Thesis]