خط مشی دسترسیدرباره ما
ثبت نامثبت نام
راهنماراهنما
فارسی
ورودورود
صفحه اصلیصفحه اصلی
جستجوی مدارک
تمام متن
منابع دیجیتالی
رکورد قبلیرکورد بعدی
Document Type : Latin Dissertation
Language of Document : English
Record Number : 151598
Doc. No : ET23390
Main Entry : SUN Winston
Title Proper : A SURFACE MICROMACHINED CANTILEVER BEAM ROTATION SENSOR
Note : This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract : An innovative, alternative, yet feasibIe way of angular motion sensing ispresented in this dissertation. A novel MEMS surface micromachined non-contacthigh-speed rotation sensor with total surface area under 4mm2 was developed usingthe MCNC Multi-User MEMS Process (MUMPS). This dissertation discusses thebackground, design criteria, and characteristics of this sensor. Six versions of sensorwith variations in beam and platform dimensions are designed. Comparisons withexisting methods and angular sensing devices are also addressed. A simplifiedmathematical model of this sensor was built. Responses of the sensors weresimulated and predicted to a certain extend under different angular speeds and otherphysical parameters. Surface roughness and curvature of the sensor platform in bothtransverse and longitudinal directions due to residual stress induced during thefabrication were measured. Platform lifting experiments were conducted to find outthe relation between the change in beam resistance and estimated platform deflectionangles. An experimental setup with electric motor, speed controller, power supply,wireless transmitting and receiving circuits, computer interface circuit for dataacquisition and storage, and all necessary mechanical components made by rapidprototyping (RP) machine were built. Spinning experiments were conducted to find.....-....,....-...,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject : Electericl tess
: برق
electronic file name : TL46629.pdf
Title and statement of responsibility and : A SURFACE MICROMACHINED CANTILEVER BEAM ROTATION SENSOR [Thesis]
 
 
 
(در صورت عدم وضوح تصویر اینجا را کلیک نمایید)