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Document Type : Latin Dissertation
Language of Document : English
Record Number : 151462
Doc. No : ET23254
Main Entry : TRIFON M. LIAKOPOULOS
Title Proper : MAGNETIC MEMS-BASED MICROSTRUCTURES AND SENSORS USlNG A NEW THICK PHOTOLITHOGRAPHY TECHNIQUE
Note : This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract : The research objective of this dissertation is to design. implement. andct~aracterizs innovatitre magnetic microstructures. microinductors and magnetic sensorsusing a new UV-LIGA (UV-based. Lithography and Ga1vanoforrning)- based magneticMEIMS ( Micro-Electro-Mechanical Systems) technology.Using a microinductor as a foundry magnetic component. the large demand forthe realization of magnetic-based microsystems such as electrical signal conversionsystems. microfluidic systems. magnetic field sensing systems. and on-chip DC/DCpo\\.er converters. can be satisfied. The realization of efficient. 3-dimensionalrnicroinductors on a chip as confined magnetic flux generators has been consideredessential and difficult task to be performed prior to the realization of a CMOS / MEMSintegrated system.....-....,....-...,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject : Electericl tess
: برق
electronic file name : TL46490.pdf
Title and statement of responsibility and : MAGNETIC MEMS-BASED MICROSTRUCTURES AND SENSORS USlNG A NEW THICK PHOTOLITHOGRAPHY TECHNIQUE [Thesis]
 
 
 
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