Fabrication of Thin Film Nanoscale Alumina Templates

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" Fabrication of Thin Film Nanoscale Alumina Templates "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	151335
Doc. No	:	ET23127
Main Entry	:	Paul B. Sines
Title Proper	:	Fabrication of Thin Film Nanoscale Alumina Templates
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	Semiconductor nanostructures have superior electronic and optical properties that are expected toplay an important role in 21st century electronic and photonic devices. Recognizing this potential,semiconductor nanostructures have been the focus of research over the past 25 years, and manyultra-high performance devices have been demonstrated. While the potential of this class ofdevices is clear, their commercial applications have been limited by the lack of a fabricationprocess suited to economical volume production. The initial method of nanostructure fabricationusing electron beam lithography and reactive ion etching is not considered practical due to its highcost and low throughput. The technologies that are considered serious candidates are thenanogrowth techniques where the semiconductor material is synthesized in the size and the shapeof the nanostructures. Most of these techniques, however, do not provide any control overnanostructure size and periodicity which are important requirements for device applications.We have developed a nanostructure fabrication technique that provides excellent control overdevice size and periodicity, and is appropriate for low cost commercial manufacturing. Thistechnique uses electrochemical synthesis of semiconductor nanostructures in a preformed alumina(Al2O3) template. The template is created by electrochemically etching, or anodizing, a thin layerof aluminum deposited on a silicon or a glass substrate. When aluminum is anodized, a twodimensional periodic network of....-....,....-...,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL46363.pdf
Title and statement of responsibility and	:	Fabrication of Thin Film Nanoscale Alumina Templates [Thesis]