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Document Type : Latin Dissertation
Language of Document : English
Record Number : 151330
Doc. No : ET23122
Main Entry : Christopher James Garman
Title Proper : Electrical Characterization of Thin Film Nanostructure Templates
Note : This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract : An improved apparatus for anodizing aluminum films on Si substrates is presented. In addition,an explanation is given for adapting the system to SiC and glass substrates. The systempresented is optimized for throughput and safety to focus on volume production. MOScapacitors created with the system are analyzed with capacitance-voltage measurementtechniques to provide insight into device operation. Ni is deposited into porous aluminatemplates to create Ni nanostructures.....-....,....-...,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject : Electericl tess
: برق
electronic file name : TL46358.pdf
Title and statement of responsibility and : Electrical Characterization of Thin Film Nanostructure Templates [Thesis]
 
 
 
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