BULK-MICROMACHINED MASS AIRFLOW SENSOR FABRICATION AND TESTING METHODOLOGY FOR AN UNDERGRADUATE MlCROFABRlCATlON COURSE

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" BULK-MICROMACHINED MASS AIRFLOW SENSOR FABRICATION AND TESTING METHODOLOGY FOR AN UNDERGRADUATE MlCROFABRlCATlON COURSE "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	150947
Doc. No	:	ET22739
Main Entry	:	Jason 6. Cole
Title Proper	:	BULK-MICROMACHINED MASS AIRFLOW SENSOR FABRICATION AND TESTING METHODOLOGY FOR AN UNDERGRADUATE MlCROFABRlCATlON COURSE
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	In July 1995, National Science Foundation Award 9551869 funded the development ofa new inter-disciplinary microfabrication course under the primary leadership of Dr. Kevin Walshat the University of Louisvi!!e. Along with this award, the completed construction of a newbuilding in 1996 that contained a class 100011 00 cleanroom laboratory facilitated thedevelopment of the course. Moreover, curricula had to be completed to provide students withpractical, hands-on experience in building Micro Electro-Mechanical Systems (MEMS) devicesusing processes and methodologies introduced in the course. Dr. Walsh wanted to include amass airflow sensor in his portfolio of total possible devices students could build in the cleanroomlab for the course. This document describes the design of a bulk-micromachined, monolithic,mass airflow sensor with a thermally-isolated, thin-,....-...,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL45965.pdf
Title and statement of responsibility and	:	BULK-MICROMACHINED MASS AIRFLOW SENSOR FABRICATION AND TESTING METHODOLOGY FOR AN UNDERGRADUATE MlCROFABRlCATlON COURSE [Thesis]