THREE-DIMENSIONAL MONOLITHIC MEMS COIL

منو

" THREE-DIMENSIONAL MONOLITHIC MEMS COIL "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	150709
Doc. No	:	ET22501
Main Entry	:	Jing SUN
Title Proper	:	THREE-DIMENSIONAL MONOLITHIC MEMS COIL
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	In this research, design and processing of multi-stack three-dimensional RF coilhas been investigated and developed to meet the needs of small-size high-resistanceinductors. Different materials and fabrication technologies have been developed tobuild a three-dimensional coil structure in the most stable and efficient method.The experimented sample was built on the surface of a standard 2-inch wafer. Theheight of the poles is limited by the aspect ratios of the photoresist and polyimideused in the fabrication process. Both AZ4620 photoresist and PI2611 polyimide filmtechniques have been tried to improve the structure to the limit. An initial mask wasdesigned to test the limitation of equipment and materials. A final mask with moreconservative design has been fabricated and showed better results.....-...,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL45722.pdf
Title and statement of responsibility and	:	THREE-DIMENSIONAL MONOLITHIC MEMS COIL [Thesis]