HYBRID INTEGRATION OF SILICON/SILICONE MICROSYSTEMS: A Closed-Loop, Autonomous

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" HYBRID INTEGRATION OF SILICON/SILICONE MICROSYSTEMS: A Closed-Loop, Autonomous "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	150172
Doc. No	:	ET21964
Main Entry	:	Jennifer Blain Christen
Title Proper	:	HYBRID INTEGRATION OF SILICON/SILICONE MICROSYSTEMS: A Closed-Loop, Autonomous
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	Since the 1950's, the microelectronics industry has seen a remarkable evolutionfrom the centimeter-scale devices created by Jack Kilby to millimeter-scale integratedcircuits fabricated by Robert Noyce to today's 8nm feature size MOS transistors.During this time, not only have exponential improvements been made in the size ofthe devices, but the CAD and workstation technologies have advanced at a similarpace enabling the design of truly complex systems on a chip. The microfabricationand micro-engineering advances that have made all this possible have depended uponthe ability to produce integrated electronic components through rapid, low-cost tech-niques that yield highly accurate and reproducible structures. Adaptation of thesesilicon-based technologies together with advances in new bio-material have led toincredible advances in microfluidics through soft lithography of PDMS. These mi-.,..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL45160.pdf
Title and statement of responsibility and	:	HYBRID INTEGRATION OF SILICON/SILICONE MICROSYSTEMS: A Closed-Loop, Autonomous [Thesis]