A TECHNIQUE FOR THE MEASUREMENT OF RELATIVE VELOCITY BETWEEN  PARALLEL PLATE ELECTRODES IN MICROMACHINED STRUCTURES

منو

" A TECHNIQUE FOR THE MEASUREMENT OF RELATIVE VELOCITY BETWEEN PARALLEL PLATE ELECTRODES IN MICROMACHINED STRUCTURES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	149906
Doc. No	:	ET21698
Main Entry	:	Robert Neal Dean, Jr.
Title Proper	:	A TECHNIQUE FOR THE MEASUREMENT OF RELATIVE VELOCITY BETWEEN PARALLEL PLATE ELECTRODES IN MICROMACHINED STRUCTURES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	Numerous applications exist for microstructures that contain two parallel oriented electrodes that experience relative motion. It is often desirable to measure the relative velocity between the two electrodes and then utilize this information. Relative velocity can readily be measured in these types of microsystems if the relative motion of the electrodes is constrained such that the partial derivative of the capacitance between the electrodes with respect to the electrode separation distance is constant, by measuring the current flowing through the time varying capacitor. However, for electrostatic parallel plate actuators and other micr..tested for theQ1 PC1 bus cardBoth these projects mere sofixare des elopment efforts tonards contributing to dlfferentaspects of Roboucs and lZ1echatronics projects m the Controls and Roboucs Group..
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL44880.pdf
Title and statement of responsibility and	:	A TECHNIQUE FOR THE MEASUREMENT OF RELATIVE VELOCITY BETWEEN PARALLEL PLATE ELECTRODES IN MICROMACHINED STRUCTURES [Thesis]