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" ANALYSIS AND DESIGN OF MEMS SCAN MIRRORS USING PERIODICALLY STIFFENED SILICON NITRIDE "


Document Type : Latin Dissertation
Language of Document : English
Record Number : 149255
Doc. No : ET21047
Main Entry : Bert Jeffrey Lutzenberger
Title Proper : ANALYSIS AND DESIGN OF MEMS SCAN MIRRORS USING PERIODICALLY STIFFENED SILICON NITRIDE
Note : This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract : I would like to thank David Dickensheets for broadening my mechanics-centricperspective of the physical world. I would like to thank Robert Oakberg for remindingme just how important a mechanistبs perspective can be. Thanks to both of you forhelping me study this topic from both perspectives.I would also like to thank my colleagues for many thought-provoking andinsightful discussions. To Phil, Eric (Yanni), and Marshal, thanks for your help along theway.To my family and friends, Mom, Dad, Julie, Jeremy, Christy, Steve, Harry,Virginia, Joanne, Vern, Shade and Tanner thanks for always believing in me.Most importantly, to my loving wife and kids, Chris, Davey, Faith and John,thank you for all your sacrifices, help and support along the way..
Subject : Electericl tess
: برق
electronic file name : TL44195.pdf
Title and statement of responsibility and : ANALYSIS AND DESIGN OF MEMS SCAN MIRRORS USING PERIODICALLY STIFFENED SILICON NITRIDE [Thesis]
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TL44195.pdf
TL44195.pdf
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