DEVELOPMENT OF A PROCESS FOR FABRICATING HIGH ASPECT RATIO PARYLENE MICROSTRUCTURES

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" DEVELOPMENT OF A PROCESS FOR FABRICATING HIGH ASPECT RATIO PARYLENE MICROSTRUCTURES "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	149147
Doc. No	:	ET20939
Main Entry	:	Asma Waqar,
Title Proper	:	DEVELOPMENT OF A PROCESS FOR FABRICATING HIGH ASPECT RATIO PARYLENE MICROSTRUCTURES
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	PARYLENE (poly-para-xylyene) is mostly used as a conformal protective plymerpin-hole free coating material to uniformly protect any component configuration ondiverse substrates. This thesis describes in detail how the unique properties of parylenecan be conveniently combined with MEMS technology to meet biocompatibilityrequirements of biological and.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL44085.pdf
Title and statement of responsibility and	:	DEVELOPMENT OF A PROCESS FOR FABRICATING HIGH ASPECT RATIO PARYLENE MICROSTRUCTURES [Thesis]