Investigation of a Method for Integration of Optical Nanoprobes with CMOS Photodetection Circuitry

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" Investigation of a Method for Integration of Optical Nanoprobes with CMOS Photodetection Circuitry "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	148844
Doc. No	:	ET20636
Main Entry	:	Kuntao Ye
Title Proper	:	Investigation of a Method for Integration of Optical Nanoprobes with CMOS Photodetection Circuitry
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	In this thesis, we demonstrated and analyzed a method of integrating optical nanoprobes withCMOS photodetection circuitry. The integrated device could potentially be used to produce acompact near field optical scanning microscopy (NSOM) system.The method studied involves the fabrication of V-grooves on the CMOS chip using a CMOScompatible MEMS etching process and other supplementary microfabrication techniques. Oncethey are fabricated on.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL43776.pdf
Title and statement of responsibility and	:	Investigation of a Method for Integration of Optical Nanoprobes with CMOS Photodetection Circuitry [Thesis]