A PROGRAMMABLE MASK FOR DIRECT WRITE LITHOGRAPHY

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" A PROGRAMMABLE MASK FOR DIRECT WRITE LITHOGRAPHY "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	148742
Doc. No	:	ET20534
Main Entry	:	Kunal Pharas
Title Proper	:	A PROGRAMMABLE MASK FOR DIRECT WRITE LITHOGRAPHY
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	Lithographic processes for printing device structures on integrated circuits plays amajor role in the semiconductor industry. This project aims at designing and fabricating aprogrammable mask for a direct write lithography system which can achieve higherthroughput at a reasonable cost for the semiconductor industry in the future. The devicehas apertures of different.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL43671.pdf
Title and statement of responsibility and	:	A PROGRAMMABLE MASK FOR DIRECT WRITE LITHOGRAPHY [Thesis]