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Document Type : Latin Dissertation
Language of Document : English
Record Number : 148534
Doc. No : ET20326
Main Entry : Brian Carl Morgan
Title Proper : ELECTROSTATIC MEMS ACTUATORS USING GRAY-SCALE TECHNOLOGY
Note : This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract : The majority of fabrication techniques used in micro-electro-mechanical systems(MEMS) are planar technologies, which severely limits the structures available duringdevice design. In contrast, the emerging gray-scale teclznology is an attractive option forbatch fabricating 3-D structures in silicon using a single lithography and etching step.While gray-scale technology is extremely versatile, limited research has been doneregarding the integration of this technology with other MEMS processes and devices.This work begins with the development of a fundamental empirical model forpredicting and designing complex 3-.
Subject : Electericl tess
: برق
electronic file name : TL43453.pdf
Title and statement of responsibility and : ELECTROSTATIC MEMS ACTUATORS USING GRAY-SCALE TECHNOLOGY [Thesis]
 
 
 
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