ELECTROSTATIC MEMS ACTUATORS USING GRAY-SCALE TECHNOLOGY

منو

" ELECTROSTATIC MEMS ACTUATORS USING GRAY-SCALE TECHNOLOGY "

Document Type	:	Latin Dissertation
Language of Document	:	English
Record Number	:	148534
Doc. No	:	ET20326
Main Entry	:	Brian Carl Morgan
Title Proper	:	ELECTROSTATIC MEMS ACTUATORS USING GRAY-SCALE TECHNOLOGY
Note	:	This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract	:	The majority of fabrication techniques used in micro-electro-mechanical systems(MEMS) are planar technologies, which severely limits the structures available duringdevice design. In contrast, the emerging gray-scale teclznology is an attractive option forbatch fabricating 3-D structures in silicon using a single lithography and etching step.While gray-scale technology is extremely versatile, limited research has been doneregarding the integration of this technology with other MEMS processes and devices.This work begins with the development of a fundamental empirical model forpredicting and designing complex 3-.
Subject	:	Electericl tess
	:	برق
electronic file name	:	TL43453.pdf
Title and statement of responsibility and	:	ELECTROSTATIC MEMS ACTUATORS USING GRAY-SCALE TECHNOLOGY [Thesis]