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" CONTROL SYSTEM DESIGN FOR NANOMETER SCALE POSITIONING SYSTEMS "


Document Type : Latin Dissertation
Language of Document : English
Record Number : 148471
Doc. No : ET20263
Main Entry : FRANK JAMES GOFORTH
Title Proper : CONTROL SYSTEM DESIGN FOR NANOMETER SCALE POSITIONING SYSTEMS
Note : This document is digital این مدرک بصورت الکترونیکی می باشد
Abstract : Nanometer positioning presents unique challenges because devices capable of thisaccuracy exhibit hysteretic behavior. Hysteresis is characterized by rate independentmemory and multi-valued output, limiting even the application of nonlinear control.Previous researchers have pursued a control strategy dependent on precision models ofhysteresis. The physical principles of these hysteretic devices are not well understood andthe models exhibiting best fidelity to.
Subject : Electericl tess
: برق
electronic file name : TL43389.pdf
Title and statement of responsibility and : CONTROL SYSTEM DESIGN FOR NANOMETER SCALE POSITIONING SYSTEMS [Thesis]
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TL43389.pdf
TL43389.pdf
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